A Novel Single-Axis MEMS Tilt Sensor with a High Sensitivity in the Measurement Range from 0∘ to 360 - Wang, Shudong; Wei, Xueyong; Weng, Yinsheng; Zhao, Yulong; Jiang, Zhuangde (Sensors (Basel, Switzerland), 2018)
Keywords: double-ended tuning fork; MEMS; oscillator; resonator; Sensors; Strain gauges; tilt sensor; tilt sensor; MEMS; oscillator; double-ended tuning fork; resonator