Parallel Laser Micro/Nano‐Processing for Functional Device Fabrication

• Published in: Laser & photonics reviews Vol. 14; no. 3
• Main Authors: Li, Yang, Hong, Minghui
• Format: Journal Article
• Language: English
• Published: Weinheim Wiley Subscription Services, Inc 01.03.2020
• Subjects: Direct laser writing; Lasers; Metamaterials; micro/nano‐fabrication; Microspheres; Parallel processing; Patterning; Photolithography; Photomasks; Photovoltaic cells; Solar cells

Photolithography is one of the most commonly used techniques in semiconductor manufacturing, which is the foundation for all the modern electronic device fabrication. However, deep and extreme ultraviolet lithographic systems as well as the corresponding photomasks are both relatively expensive. The...