Parallel Laser Micro/Nano‐Processing for Functional Device Fabrication - Li, Yang; Hong, Minghui (Laser & photonics reviews, 2020)
Keywords: Direct laser writing; Lasers; Metamaterials; micro/nano‐fabrication; Microspheres; Parallel processing; Patterning; Photolithography; Photomasks; Photovoltaic cells; Solar cells