Stabilization of electrostatically actuated microstructures using parametric excitation - Krylov, Slava; Harari, Isaac; Cohen, Yaron (Journal of micromechanics and microengineering, 2005)
Keywords: Applied sciences; Electronics; Exact sciences and technology; Instruments, apparatus, components and techniques common to several branches of physics and astronomy; Mechanical engineering. Machine design; Mechanical instruments, equipment and techniques; Microelectronic fabrication (materials and surfaces technology); Micromechanical devices and systems; Physics; Precision engineering, watch making; Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices; Parametric excitation; Stability; Mathieu equation; Stabilization; Pull in voltage; Capacitive transducer; Galerkin method; Non linear effect; Hill equation; Modeling; Cantilever beam; Electrostatic force