Performance of hydrothermal PZT film on high intensity operation

• Published in: Sensors and actuators. A. Physical. Vol. 89; no. 1; pp. 16 - 21
• Main Authors: Kanda, Takefumi, Kurosawa, Minoru Kuribayashi, Yasui, Hidehiko, Higuchi, Toshiro
• Format: Journal Article Conference Proceeding
• Language: English
• Published: Lausanne Elsevier B.V 20.03.2001; Elsevier Science
• Subjects: Applied sciences; Cross-disciplinary physics: materials science; rheology; Electronics; Exact sciences and technology; General equipment and techniques; Hydrothermal method; Instruments, apparatus, components and techniques common to several branches of physics and astronomy; Materials science; Microelectronic fabrication (materials and surfaces technology); Physics; Polycrystal structure; PZT; Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices; Specific materials; Specific materials: fabrication, treatment, testing and analysis; Thin film; Transducers; Vibration velocity; Vibration velocity; Polycrystal structure; Hydrothermal method; PZT; Thin film; Transducer; Hydrothermal systems; Resonance frequency; Polycrystal; Vibration amplitude; Experimental study; Deposition process
• ISSN: 0924-4247; 1873-3069
• DOI: 10.1016/S0924-4247(00)00530-6

The deposition processes of PZT thin films have been described in many reports, yet there have been no descriptions of the performance of PZT films at high intensity operation. Hydrothermally-deposited PZT film transducers were examined at large vibration amplitude levels at resonance frequencies. It was demonstrated that the hydrothermal PZT film expresses superior performance with regard to linearity and maximum vibration velocity. The linearity of frequency responses at around the resonance frequency was excellent and superior to bulk material up to high intensity operation. The characteristics of longitudinal transducers using films formed under two deposition processes were tested. The maximum vibration velocity was 2.24 m/s when the thickness of the film was 38 μm and the driving voltage was 145 V p–p. This velocity value was much larger than bulk PZT materials for high power applications.