Effects of different divalent cations in mTi-based codopants (m = Mg or Zn) on the piezoelectric properties of AlN thin films - Anggraini, Sri Ayu; Uehara, Masato; Hirata, Kenji; Yamada, Hiroshi; Akiyama, Morito (Ceramics international, 2020)
Keywords: Aluminum nitride; MgTi codopants; Piezoelectricity; Sputtering; Thin films; ZnTi codopants; Thin films; Piezoelectricity; MgTi codopants; ZnTi codopants; Sputtering; Aluminum nitride