A new approach to the CZ crystal growth weighing control

• Published in: Journal of crystal growth Vol. 390; pp. 67 - 70
• Main Authors: Kasimkin, P.V., Moskovskih, V.A., Vasiliev, Y.V., Shlegel, V.N., Yuferev, V.S., Vasiliev, M.G., Zhdankov, V.N.
• Format: Journal Article
• Language: English
• Published: Elsevier B.V 15.03.2014
• Subjects: A1. Control system design; A2. Automated melt growth; A2. Czochralski method; B2. Semiconducting germanium; Control systems; Crystal growth; Dynamical systems; Hydrostatic pressure; Instability; Semiconductors; Stability; Weighing; A1. Control system design; B2. Semiconducting germanium; A2. Czochralski method; A2. Automated melt growth

The aim of a new approach was to improve the robustness of the weighing control of CZ growth especially for semiconductors, for which the “anomalous“ behavior of the apparent weight provokes instability of the servo-loop. In the described method, the periodic reciprocating measuring motion of small...