Preparation of YbAlN piezoelectric thin film by sputtering and influence of Yb concentration on properties and crystal structure - Uehara, Masato; Amano, Yuki; Anggraini, Sri Ayu; Hirata, Kenji; Yamada, Hiroshi; Akiyama, Morito (Ceramics international, 2021)
Keywords: Aluminum nitride; And ytterbium; Crystal structure; Design of experimental; Piezoelectricity; Sputtering; Piezoelectricity; And ytterbium; Design of experimental; Sputtering; Aluminum nitride; Crystal structure