APA (7th ed.) Citation

Uehara, M., Amano, Y., Anggraini, S. A., Hirata, K., Yamada, H., & Akiyama, M. (2021). Preparation of YbAlN piezoelectric thin film by sputtering and influence of Yb concentration on properties and crystal structure. Ceramics international, 47(11), 16029-16036. https://doi.org/10.1016/j.ceramint.2021.02.177

Chicago Style (17th ed.) Citation

Uehara, Masato, Yuki Amano, Sri Ayu Anggraini, Kenji Hirata, Hiroshi Yamada, and Morito Akiyama. "Preparation of YbAlN Piezoelectric Thin Film by Sputtering and Influence of Yb Concentration on Properties and Crystal Structure." Ceramics International 47, no. 11 (2021): 16029-16036. https://doi.org/10.1016/j.ceramint.2021.02.177.

MLA (9th ed.) Citation

Uehara, Masato, et al. "Preparation of YbAlN Piezoelectric Thin Film by Sputtering and Influence of Yb Concentration on Properties and Crystal Structure." Ceramics International, vol. 47, no. 11, 2021, pp. 16029-16036, https://doi.org/10.1016/j.ceramint.2021.02.177.