Design study of the gate-all-around silicon nanosheet MOSFETs - Lee, Yongwoo; Park, Geon-Hwi; Choi, Bongsik; Yoon, Jinsu; Kim, Hyo-Jin; Kim, Dae Hwan; Kim, Dong Myong; Kang, Min-Ho; Choi, Sung-Jin (Semiconductor science and technology, 2020)
Keywords: effective width; gate all around; MOSFET; short-channel effects; silicon nanosheet