Black silicon – correlation between microstructure and Raman scattering - Jurečka, Stanislav; Pinčík, Emil; Imamura, Kentaro; Matsumoto, Taketoshi; Kobayashi, Hikaru (Journal of Electrical Engineering, 2019)
Keywords: Axial stress; black silicon; Correlation analysis; Etching; fractal properties; Microstructure; Optical properties; Organic chemistry; Raman scattering; Raman spectra; roughness; Silicon substrates; Surface roughness; Surface structure; TEM; Tensile stress