A serial-kinematic nanopositioner for high-speed atomic force microscopy

• Published in: Review of scientific instruments Vol. 85; no. 10; p. 105104
• Main Authors: Wadikhaye, Sachin P, Yong, Yuen Kuan, Moheimani, S O Reza
• Format: Journal Article
• Language: English
• Published: United States 01.10.2014

A flexure-guided serial-kinematic XYZ nanopositioner for high-speed Atomic Force Microscopy is presented in this paper. Two aspects influencing the performance of serial-kinematic nanopositioners are studied in this work. First, mass reduction by using tapered flexures is proposed to increased the n...