Adhesion and wear studies of magnetron sputtered NbN films

• Published in: Tribology international Vol. 50; pp. 16 - 25
• Main Authors: Singh, Kulwant, Krishnamurthy, N., Suri, A.K.
• Format: Journal Article
• Language: English
• Published: Kidlington Elsevier Ltd 01.06.2012; Elsevier
• Subjects: Adhesion; Adhesive wear; Applied sciences; Coating; Contact of materials. Friction. Wear; Deposition; Electric potential; Exact sciences and technology; Failure; Fracture mechanics (crack, fatigue, damage...); Friction; Friction, wear, lubrication; Fundamental areas of phenomenology (including applications); Machine components; Magnetron sputtering; Mechanical engineering. Machine design; Mechanical properties and methods of testing. Rheology. Fracture mechanics. Tribology; Metals. Metallurgy; Physics; Solid mechanics; Structural and continuum mechanics; Tribology; Wear; Coating; Friction; Adhesion; Wear; Acoustic emission testing; Scratching test; Autoregressive model; Coatings; Sputtering; Surface structure; Direct current; Adhesive joint; Voltage; Reciprocating movement machine; Acoustic measurement; Rupture; Mechanical contact; Regression analysis; Indentation; Plate; Crystalline material; Critical load; Reactive sputtering; Cathodic sputtering; Tribology

NbN films were deposited on MS, SS and HSS substrates by reactive DC magnetron sputtering. Effects of N2 flow and substrate biasing were studied on the deposition rate, crystal structure, surface hardness, adhesion and tribology. Scratch test was carried out for adhesion evaluation. Online recording...