Aerosol synthesis of silicon nanoparticles with narrow size distribution—Part 1: Experimental investigations
A study on the feasibility of aerosol processing of nearly monodisperse silicon nanoparticles via pyrolysis of monosilane in a hot wall reactor is presented. For optimal conditions silicon nanoparticles with a geometric standard deviation of 1.06 were synthesized at a production rate of 0.7 g/h. The...
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Published in | Journal of aerosol science Vol. 41; no. 11; pp. 998 - 1007 |
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Main Authors | , , , , |
Format | Journal Article |
Language | English |
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01.11.2010
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Abstract | A study on the feasibility of aerosol processing of nearly monodisperse silicon nanoparticles via pyrolysis of monosilane in a hot wall reactor is presented. For optimal conditions silicon nanoparticles with a geometric standard deviation of 1.06 were synthesized at a production rate of 0.7
g/h. The size of the particles could be precisely controlled in the range of 20–40
nm, whilst maintaining a geometric standard deviation in the range of 1.06–1.08, by proper choice of the governing parameters temperature, residence time and precursor concentration. The results show that narrow particle size distributions can only be obtained in the temperature range between 900 and 1100
°C, as long as both the initial silane concentration (1
mbar silane partial pressure) and the reactor total pressure are low (25
mbar). This regime for the production of narrow particle size distributions has not been identified in prior work on the thermal decomposition of silane. Narrowly distributed particles can be obtained under conditions where nucleation and particle growth are separated and the agglomeration rates are negligible. |
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AbstractList | A study on the feasibility of aerosol processing of nearly monodisperse silicon nanoparticles via pyrolysis of monosilane in a hot wall reactor is presented. For optimal conditions silicon nanoparticles with a geometric standard deviation of 1.06 were synthesized at a production rate of 0.7 g/h. The size of the particles could be precisely controlled in the range of 20-40 nm, whilst maintaining a geometric standard deviation in the range of 1.06-1.08, by proper choice of the governing parameters temperature, residence time and precursor concentration. The results show that narrow particle size distributions can only be obtained in the temperature range between 900 and 1100 C, as long as both the initial silane concentration (1 mbar silane partial pressure) and the reactor total pressure are low (25 mbar). This regime for the production of narrow particle size distributions has not been identified in prior work on the thermal decomposition of silane. Narrowly distributed particles can be obtained under conditions where nucleation and particle growth are separated and the agglomeration rates are negligible. A study on the feasibility of aerosol processing of nearly monodisperse silicon nanoparticles via pyrolysis of monosilane in a hot wall reactor is presented. For optimal conditions silicon nanoparticles with a geometric standard deviation of 1.06 were synthesized at a production rate of 0.7 g/h. The size of the particles could be precisely controlled in the range of 20–40 nm, whilst maintaining a geometric standard deviation in the range of 1.06–1.08, by proper choice of the governing parameters temperature, residence time and precursor concentration. The results show that narrow particle size distributions can only be obtained in the temperature range between 900 and 1100 °C, as long as both the initial silane concentration (1 mbar silane partial pressure) and the reactor total pressure are low (25 mbar). This regime for the production of narrow particle size distributions has not been identified in prior work on the thermal decomposition of silane. Narrowly distributed particles can be obtained under conditions where nucleation and particle growth are separated and the agglomeration rates are negligible. |
Author | Jank, M.P.M. Ryssel, H. Körmer, R. Schmid, H.-J. Peukert, W. |
Author_xml | – sequence: 1 givenname: R. surname: Körmer fullname: Körmer, R. organization: Institute of Particle Technology, Friedrich-Alexander University, Cauerstr. 4, 91058 Erlangen, Germany – sequence: 2 givenname: M.P.M. surname: Jank fullname: Jank, M.P.M. organization: Fraunhofer Institute for Integrated Systems and Device Technology, Schottkystr. 10, 91058 Erlangen, Germany – sequence: 3 givenname: H. surname: Ryssel fullname: Ryssel, H. organization: Fraunhofer Institute for Integrated Systems and Device Technology, Schottkystr. 10, 91058 Erlangen, Germany – sequence: 4 givenname: H.-J. surname: Schmid fullname: Schmid, H.-J. organization: Institute of Mechanical and Environmental Process Engineering, University of Paderborn, Pohlweg 55, 33098 Paderborn, Germany – sequence: 5 givenname: W. surname: Peukert fullname: Peukert, W. email: w.peukert@lfg.uni-erlangen.de organization: Institute of Particle Technology, Friedrich-Alexander University, Cauerstr. 4, 91058 Erlangen, Germany |
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Keywords | Nanoparticles Silicon Monodisperse Hot wall reactor Aerosol synthesis Pyrolysis Nucleation Wall Residence time Growth Thermal decomposition Nanoparticle Agglomeration Precursor Particle size distribution Partial pressure Synthesis Distribution Production Aerosols Monodispersed particle Standard deviation Reactor Silane |
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Snippet | A study on the feasibility of aerosol processing of nearly monodisperse silicon nanoparticles via pyrolysis of monosilane in a hot wall reactor is presented.... |
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SubjectTerms | Aerosol synthesis Aerosols Chemistry Colloidal state and disperse state Exact sciences and technology General and physical chemistry Hot wall reactor Monodisperse Nanoparticles Physical and chemical studies. Granulometry. Electrokinetic phenomena Silicon |
Title | Aerosol synthesis of silicon nanoparticles with narrow size distribution—Part 1: Experimental investigations |
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