Vapor deposition of polyimide: segregation of partially reacted species at the polyimide/Si (100) interface

• Published in: Thin solid films Vol. 305; no. 1; pp. 26 - 29
• Main Authors: Liberman, Vladimir, Malba, Vincent, Bernhardt, Anthony F.
• Format: Journal Article
• Language: English
• Published: Elsevier B.V 01.08.1997
• Subjects: Adhesion; Deposition process; Fourier transform infrared spectroscopy; Polymers; Fourier transform infrared spectroscopy; Polymers; Adhesion; Deposition process

We examined the vapor deposition of polyimide produced by co-evaporation of pyromellitic dianhydride and oxydianiline. Using internal reflectance spectroscopy and prism coupling techniques, we monitored the effects of varying relative monomer fluxes on cured film stoichiometry. We observed the effec...