Self‐Expansion Based Multi‐Patterning for 2D Materials Fabrication beyond the Lithographical Limit - Borhade, Poonam Subhash; Chen, Tawat; Chen, Ding‐Rui; Chen, Yu‐Xiang; Yao, Yu‐Chi; Yen, Zhi‐Long; Tsai, Chun Hsiung; Hsieh, Ya‐Ping; Hofmann, Mario (Small (Weinheim an der Bergstrasse, Germany), 2024)
Keywords: 2D materials electronics; Diffraction patterns; multi‐patterning; nanosheet transistors; Oxidation; Patterning; self‐expansion double patterning; Semiconductor devices; Silicon transistors; Two dimensional materials; ultra‐scaled devices; nanosheet transistors; ultra-scaled devices; self-expansion double patterning; multi-patterning; 2D materials electronics