Study on the characteristics of atomic hydrogen cleaning carbon contamination on multilayers - Song, Yuan; Lu, Qipeng; Gong, Xuepeng; Wang, Dazhuang; Zhang, Zhen; Yu, Bo; Yao, Shun; Mao, Qijun; Ma, Tianyu; Bai, Yang (Vacuum, 2022)
Keywords: Atomic hydrogen cleaning; Carbon contamination on multilayers; Cleaning mechanism; Extreme ultraviolet lithography; Synchrotron radiation; Extreme ultraviolet lithography; Carbon contamination on multilayers; Cleaning mechanism; Synchrotron radiation; Atomic hydrogen cleaning