Effect of working pressure and temperature on ZnO film deposited on free-standing diamond substrates - 赵平 夏义本 王林军 刘健敏 徐闰 彭鸿雁 史伟民 (Transactions of Nonferrous Metals Society of China, 2006)
Keywords: c-axis orientation; free-standing diamond film; radio-frequency magnetron sputtering; surface acoustic wave device; ZnO film; 加工压力; 加工温度; 声表面波器件; 氧化锌薄膜; 沉积; 自立金刚石衬底; ZnO film; surface acoustic wave device; c-axis orientation; free-standing diamond film; radio-frequency magnetron sputtering