A new shape memory alloy microvalve based on surface acoustic wave

• Published in: Ferroelectrics Vol. 504; no. 1; pp. 22 - 30
• Main Authors: Liu, Wei-Yue, Fu, Xiang-Ting, Zhang, Xiao-Quan, Hu, Wen-Yan
• Format: Journal Article
• Language: English
• Published: Philadelphia Taylor & Francis 13.11.2016; Taylor & Francis Ltd
• Subjects: Acoustics; Alloys; Circuit boards; Droplets; Electric wire; Ferroelectrics; Heating; interdigital transducer; microevalve; microfluidic system; piezoelectric substrate; Piezoelectricity; Shape memory alloys; Surface acoustic wave; Surface acoustic waves; Surface waves; Switching

A new shape memory alloy (SMA) microvalve, which is switched on or off by surface acoustic wave, is presented. Two interdigital transducers with 27.5 MHz center frequency respectively are fabricated on a 128 0 yx-LiNbO 3 piezoelectric substrate for exciting surface acoustic waves. The surface acoust...