A critical review on challenges and trend of ultrapure water production process

• Published in: The Science of the total environment Vol. 785; p. 147254
• Main Authors: Zhang, Xinbo, Yang, Yuanying, Ngo, Huu Hao, Guo, Wenshan, Wen, Haitao, Wang, Xiao, Zhang, Jianqing, Long, Tianwei
• Format: Journal Article
• Language: English
• Published: Netherlands Elsevier B.V 01.09.2021
• Subjects: Advanced oxidation; Organic; Ultrapure water; Urea; Urea; Advanced oxidation; Ultrapure water; Organic

The recent and vigorous developments in semiconductor technology strictly request better quality and large quantity of ultrapure water (UPW) for their production. It is crucial to secure a large amount of raw water for the future development of UPW production. Using reclaimed water as alternative ra...