Synthesis of ZnO nanoparticles on Si substrates using a ZnS source

• Published in: Journal of crystal growth Vol. 260; no. 3; pp. 309 - 315
• Main Authors: Li, Y.J, Duan, R, Shi, P.B, Qin, G.G
• Format: Journal Article
• Language: English
• Published: Amsterdam Elsevier B.V 01.01.2004; Elsevier
• Subjects: B1. Nanomaterials; B1. Zinc compounds; B2. Semiconducting II-VI materials; Chemical synthesis methods; Cross-disciplinary physics: materials science; rheology; Exact sciences and technology; Materials science; Methods of nanofabrication; Nanopowders; Nanoscale materials and structures: fabrication and characterization; Physics; 81.05.Ys; B1. Nanomaterials; B2. Semiconducting II-VI materials; 81.15.Gh; 81.05.Dz; B1. Zinc compounds; Atomic force microscopy; Particle size; Inorganic compounds; Catalysts; Transition element compounds; Binary compounds; Crystal growth from vapors; Experimental study; CVD; Nanoparticles; Zinc oxides; 81.15.Gh B1. Nanomaterials; II-VI semiconductors; Wide band gap semiconductors; Nanostructured materials
• DOI: 10.1016/j.jcrysgro.2003.08.041
• ISSN: 0022-0248

Crystalline ZnO nanoparticles were synthesized on Si substrates with or without a Au catalyst by a chemical vapor deposition (CVD) method using ZnS as the source material. The average sizes are in the range of 40–200 nm and the densities of 10 4–10 10 cm −2. In the absence of an Au catalyst, the average nanoparticle size firstly decreases and then increases with increasing substrate temperature while the nanoparticle density decreases as the substrate temperature increases. In the presence of an Au catalyst, ZnO nanoparticles only grow when the substrate temperature is higher than 300°C and the higher the substrate temperature the denser the nanoparticles are deposited. The density of the ZnO nanoparticles grown on a Si (1 1 1) substrate is higher than that on a Si (1 0 0) substrate with or without Au catalyst.