Fluid density sensor based on resonance vibration
This paper presents the first silicon tube resonant fluid density sensor. The sensor is based on a tube system which is vibrated in a selected balanced mixed torsion and bending mode. The resonant frequency changes with the density of the fluid in the tube due to the change of the inertial mass of t...
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Published in | Sensors and actuators. A. Physical. Vol. 47; no. 1; pp. 327 - 331 |
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Main Authors | , , |
Format | Journal Article Conference Proceeding |
Language | English |
Published |
Lausanne
Elsevier B.V
1995
Elsevier Science |
Subjects | |
Online Access | Get full text |
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