Neutral-layer-free directed self-assembly of block copolymer in trench using capillary force-induced meniscus

We propose trench-directed self-assembly (TDSA) of a block copolymer (BCP) driven by a capillary force-induced meniscus as a facile scalable nanolithography method. Unlike conventional directed self-assembly methods, TDSA enables the achievement of neutral surface-free vertical orientations of the B...

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Published inNanotechnology Vol. 32; no. 4; p. 04LT01
Main Authors Shin, Jin Yong, Lee, Bom, Lim, Heo Yeon, Kim, Simon, Jeong, Seong-Jun
Format Journal Article
LanguageEnglish
Published England IOP Publishing 22.01.2021
Subjects
block copolymer
capillary force
directed self-assembly
nanolithography
vertical orientation
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Summary:We propose trench-directed self-assembly (TDSA) of a block copolymer (BCP) driven by a capillary force-induced meniscus as a facile scalable nanolithography method. Unlike conventional directed self-assembly methods, TDSA enables the achievement of neutral surface-free vertical orientations of the BCP nanopatterns irrespective of the polarizability of the substrate, which may be, for example, a ceramic (SiO2) on Semiconductor (Si). In our demonstration of the proposed method, we generated various morphologies of the BCP nanopatterns by varying the trench width, and molecular weight of the BCP. The proposed TDSA method is potentially advantageous for the design of a process/device layout required for the development of an effective manufacturing process.
Bibliography:NANO-126609.R1
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ISSN:0957-4484
1361-6528
DOI:10.1088/1361-6528/abbbb3