High-precision and high-efficiency fabrication of blazed grating by ultrasonic-assisted ultraprecision planing
Blazed gratings are optical components typically employed in modern optical engineering. To realize high-precision and high-efficiency fabrication of blazed gratings on reliable materials, an ultrasonic-assisted ultraprecision planing (UAUP) method using a round-nose diamond tool under elliptical vi...
Saved in:
Published in | Journal of materials processing technology Vol. 311; p. 117802 |
---|---|
Main Authors | , , , , , , , , |
Format | Journal Article |
Language | English |
Published |
Elsevier B.V
01.01.2023
|
Subjects | |
Online Access | Get full text |
Cover
Loading…
Be the first to leave a comment!