High-precision and high-efficiency fabrication of blazed grating by ultrasonic-assisted ultraprecision planing

• Published in: Journal of materials processing technology Vol. 311; p. 117802
• Main Authors: Chen, Ziqi, Yu, Qian, Shimada, Keita, Liu, Peng, He, Yupeng, Hu, Yao, Wang, Xibin, Zhou, Tianfeng, Mizutani, Masayoshi
• Format: Journal Article
• Language: English
• Published: Elsevier B.V 01.01.2023
• Subjects: Blazed grating; High-efficiency machining; Ultraprecision cutting; Ultrasonic elliptical vibration; Blazed grating; High-efficiency machining; Ultraprecision cutting; Ultrasonic elliptical vibration

Blazed gratings are optical components typically employed in modern optical engineering. To realize high-precision and high-efficiency fabrication of blazed gratings on reliable materials, an ultrasonic-assisted ultraprecision planing (UAUP) method using a round-nose diamond tool under elliptical vi...