Spectrum imaging measurements with semi-parallel detection using an AES apparatus

•Auger spectrum imaging data cube acquisition is demonstrated.•An HSA with semi-parallel detection is used.•Example imaging spectrum data is acquired for a sample with an uneven surface. We have developed a method to obtain a data cube using a semi-parallel detection scheme and an electrostatic hemi...

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Bibliographic Details
Published inUltramicroscopy Vol. 233; p. 113450
Main Authors Taguchi, Noboru, Uchida, Tatsuya, Ikita, Konomi, Tanaka, Akihiro, Ikeo, Nobuyuki, Yokouchi, Kazushiro, Tsutsumi, Kenichi
Format Journal Article
LanguageEnglish
Published Netherlands Elsevier B.V 01.03.2022
Subjects
Auger
Data cube
HSA
Parallel detection
SEM
Data cube
Auger
SEM
HSA
Parallel detection
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Summary:•Auger spectrum imaging data cube acquisition is demonstrated.•An HSA with semi-parallel detection is used.•Example imaging spectrum data is acquired for a sample with an uneven surface. We have developed a method to obtain a data cube using a semi-parallel detection scheme and an electrostatic hemispherical analyzer (HSA) with multi-channel detection. By improving the Auger intensity map measurement scheme, the number of detector energy sweeps is reduced, and faster measurement is achieved. The gain differences among the detection channel are corrected by post-processing, and a data cube of Auger electron spectra is constructed. A data cube was obtained for an example of a sample with a non-flat surface, lead-free solder. It was demonstrated to be possible to extract spectra from any position within the measurement area and create the elemental distribution maps.
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content type line 23
ISSN:0304-3991
1879-2723
DOI:10.1016/j.ultramic.2021.113450