Sealed-cavity resonant microbeam pressure sensor

• Published in: Sensors and actuators. A. Physical. Vol. 48; no. 3; pp. 179 - 186
• Main Authors: Burns, D.W., Zook, J.D., Horning, R.D., Herb, W.R., Guckel, H.
• Format: Journal Article
• Language: English
• Published: Elsevier B.V 01.01.1995
• Subjects: Fabrication; Micromachining; Polysilicon; Pressure gages; Pressure measurement; Pressure sensors; Resonant microbeams; Sealing (closing); Silicon wafers; Silicones; Pressure sensors; Polysilicon; Resonant microbeams

A quasi-digital pressure sensor based on polysilicon resonant microbeams has been demonstrated. Pressure sensitivities of nearly 4000 counts per second per psi have been attained on a 10 psi device with a base frequency of 233 000 Hz. Short-term stability as low as 0.01 ppm of the base frequency is...