Sealed-cavity resonant microbeam pressure sensor - Burns, D.W.; Zook, J.D.; Horning, R.D.; Herb, W.R.; Guckel, H. (Sensors and actuators. A. Physical., 1995)
Keywords: Fabrication; Micromachining; Polysilicon; Pressure gages; Pressure measurement; Pressure sensors; Resonant microbeams; Sealing (closing); Silicon wafers; Silicones; Pressure sensors; Polysilicon; Resonant microbeams