GaAs/AlGaAs atomic layer epitaxy in a commercial MOCVD reactor
Issues facing large area growth of GaAs by atomic layer epitaxy (ALE) are discussed. We have used a movable X-shaped mechanical barrier to divide the growth chamber into four zones. Alternate zones either supply source gas or mask the wafer from exposure to source gases. The substrate rotating benea...
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Published in | Thin solid films Vol. 225; no. 1; pp. 105 - 108 |
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Main Authors | , , |
Format | Journal Article Conference Proceeding |
Language | English |
Published |
Lausanne
Elsevier B.V
25.03.1993
Elsevier Science |
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Abstract | Issues facing large area growth of GaAs by atomic layer epitaxy (ALE) are discussed. We have used a movable X-shaped mechanical barrier to divide the growth chamber into four zones. Alternate zones either supply source gas or mask the wafer from exposure to source gases. The substrate rotating beneath the barrier is alternately exposed to Group III and Group V sources. The thickness uniformity is affected by both the spatial variation of the TMG flux and the range of TMG flux in which self-limited growth is valid. Carbon incorporation can be reduced by using TBA and increasing TBA or AsH
3 exposure time. GaAs epitaxial layers with hole concentration lower than 10
17 cm
−3 and thickness uniformity less than 2% over a 50 mm diameter wafer grown at 580 °C have been obtained. Preliminary 300 K photoluminescence measurement of ALE Al
0.34Ga
0.66As grown at 560 °C has shown strong emission intensity which compares with no emission from MOCVD AlGaAs grown at 560 °C. |
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AbstractList | GaAs films grown at 580 degrees C with hole concentration < 10 sup 1 sup 7 cm sup - sup 3 and thickness uniformity < 2% over a 50-mm-diam. wafer are obtained. Preliminary 300 K-photoluminescence data for Al sub 0 sub . sub 3 sub 4 Ga sub 0 sub . sub 6 sub 6 As grown by ALE at 560 degrees show strong emission intensity as compared with no emission from comparable AlGaAs grown by MOCVD at 560 degrees . A movable X-shaped mechanical barrier is used to divide the growth chamber into four zones with alternating zones supplying source gas or masking the wafer from exposure to source gases. Issues facing large area growth of GaAs by atomic layer epitaxy (ALE) are discussed. We have used a movable X-shaped mechanical barrier to divide the growth chamber into four zones. Alternate zones either supply source gas or mask the wafer from exposure to source gases. The substrate rotating beneath the barrier is alternately exposed to Group III and Group V sources. The thickness uniformity is affected by both the spatial variation of the TMG flux and the range of TMG flux in which self-limited growth is valid. Carbon incorporation can be reduced by using TBA and increasing TBA or AsH 3 exposure time. GaAs epitaxial layers with hole concentration lower than 10 17 cm −3 and thickness uniformity less than 2% over a 50 mm diameter wafer grown at 580 °C have been obtained. Preliminary 300 K photoluminescence measurement of ALE Al 0.34Ga 0.66As grown at 560 °C has shown strong emission intensity which compares with no emission from MOCVD AlGaAs grown at 560 °C. |
Author | Zawadzki, P.A. Liu, H. Norris, P.E. |
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Keywords | Crystal growth Thickness Gallium Arsenides Flux growth Epitaxy Aluminium Gallium Arsenides Mixed Organometallic compound Exposure time Charge carrier concentration Chemical vapor deposition |
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References | Liu, Zawadzki, Norris (BIB6) March 1992; Vol. 1676 Dapkus, Maa, Chen, Jeong, DenBaars (BIB3) 1991; 107 Dip, Colter, Eldallal, Bedair (BIB4) March 1992; Vol. 1676 Stringfellow (BIB7) 1989 Colter, Hussian, Dip, Erdogan, Duncan, Bedair (BIB2) 1991; 59 Reid, Urdianyk, Bedair (BIB8) 1991; 59 Tischler, Bedair (BIB5) 1986; 48 Ozeki, Ohtsuka, Sakuma, Kodama (BIB1) 1991; 107 Dapkus (10.1016/0040-6090(93)90136-D_BIB3) 1991; 107 Dip (10.1016/0040-6090(93)90136-D_BIB4) 1992; Vol. 1676 Tischler (10.1016/0040-6090(93)90136-D_BIB5) 1986; 48 Reid (10.1016/0040-6090(93)90136-D_BIB8) 1991; 59 Colter (10.1016/0040-6090(93)90136-D_BIB2) 1991; 59 Stringfellow (10.1016/0040-6090(93)90136-D_BIB7) 1989 Liu (10.1016/0040-6090(93)90136-D_BIB6) 1992; Vol. 1676 Ozeki (10.1016/0040-6090(93)90136-D_BIB1) 1991; 107 |
References_xml | – volume: 59 start-page: 2397 year: 1991 ident: BIB8 publication-title: Appl. Phys. Lett. contributor: fullname: Bedair – volume: 59 start-page: 1440 year: 1991 end-page: 1442 ident: BIB2 publication-title: Appl. Phys. Lett. contributor: fullname: Bedair – volume: 48 start-page: 1681 year: 1986 end-page: 1683 ident: BIB5 publication-title: Appl. Phys. Lett. contributor: fullname: Bedair – start-page: 217 year: 1989 ident: BIB7 article-title: Organometallic Vapor-Phase Epitaxy, Theory and Practice contributor: fullname: Stringfellow – volume: 107 start-page: 73 year: 1991 end-page: 82 ident: BIB3 publication-title: J. Cryst. Growth contributor: fullname: DenBaars – volume: Vol. 1676 start-page: 20 year: March 1992 ident: BIB6 publication-title: Proc. SPIE Symp. on Compound Semicond. Phys. and Devices, Somerset, NJ contributor: fullname: Norris – volume: Vol. 1676 start-page: 65 year: March 1992 ident: BIB4 publication-title: Proc. SPIE Symp. on Compound Semiconductor Physics and Devices, Somerset, NJ contributor: fullname: Bedair – volume: 107 start-page: 102 year: 1991 end-page: 110 ident: BIB1 publication-title: J. Cryst. Growth contributor: fullname: Kodama – volume: 59 start-page: 1440 issue: 12 year: 1991 ident: 10.1016/0040-6090(93)90136-D_BIB2 publication-title: Appl. Phys. Lett. doi: 10.1063/1.105281 contributor: fullname: Colter – volume: Vol. 1676 start-page: 65 year: 1992 ident: 10.1016/0040-6090(93)90136-D_BIB4 contributor: fullname: Dip – volume: 59 start-page: 2397 issue: 19 year: 1991 ident: 10.1016/0040-6090(93)90136-D_BIB8 publication-title: Appl. Phys. Lett. doi: 10.1063/1.106027 contributor: fullname: Reid – volume: Vol. 1676 start-page: 20 year: 1992 ident: 10.1016/0040-6090(93)90136-D_BIB6 contributor: fullname: Liu – volume: 107 start-page: 102 year: 1991 ident: 10.1016/0040-6090(93)90136-D_BIB1 publication-title: J. Cryst. Growth doi: 10.1016/0022-0248(91)90441-7 contributor: fullname: Ozeki – volume: 107 start-page: 73 year: 1991 ident: 10.1016/0040-6090(93)90136-D_BIB3 publication-title: J. Cryst. Growth doi: 10.1016/0022-0248(91)90437-A contributor: fullname: Dapkus – start-page: 217 year: 1989 ident: 10.1016/0040-6090(93)90136-D_BIB7 article-title: Organometallic Vapor-Phase Epitaxy, Theory and Practice contributor: fullname: Stringfellow – volume: 48 start-page: 1681 issue: 24 year: 1986 ident: 10.1016/0040-6090(93)90136-D_BIB5 publication-title: Appl. Phys. Lett. doi: 10.1063/1.96804 contributor: fullname: Tischler |
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Snippet | Issues facing large area growth of GaAs by atomic layer epitaxy (ALE) are discussed. We have used a movable X-shaped mechanical barrier to divide the growth... GaAs films grown at 580 degrees C with hole concentration < 10 sup 1 sup 7 cm sup - sup 3 and thickness uniformity < 2% over a 50-mm-diam. wafer are obtained.... |
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SubjectTerms | Condensed matter: structure, mechanical and thermal properties Exact sciences and technology Physics Solid surfaces and solid-solid interfaces Surface and interface dynamics and vibrations Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties) Thin film structure and morphology |
Title | GaAs/AlGaAs atomic layer epitaxy in a commercial MOCVD reactor |
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