Tutorial on interpreting x-ray photoelectron spectroscopy survey spectra: Questions and answers on spectra from the atomic layer deposition of Al2O3 on silicon

• Published in: Journal of vacuum science and technology. B, Nanotechnology & microelectronics Vol. 36; no. 6
• Main Authors: Shah, Dhruv, Patel, Dhananjay I., Roychowdhury, Tuhin, Rayner, G. Bruce, O’Toole, Noel, Baer, Donald R., Linford, Matthew R.
• Format: Journal Article
• Language: English
• Published: 01.11.2018

X-ray photoelectron spectroscopy (XPS) has become the most widely used method for chemically analyzing surfaces. In XPS, photoelectrons are generated by irradiating a surface with x rays. As the importance and popularity of XPS have grown, it has drawn users without significant XPS experience, and i...