APA (7th ed.) Citation

Shah, D., Patel, D. I., Roychowdhury, T., Rayner, G. B., O’Toole, N., Baer, D. R., & Linford, M. R. (2018). Tutorial on interpreting x-ray photoelectron spectroscopy survey spectra: Questions and answers on spectra from the atomic layer deposition of Al2O3 on silicon. Journal of vacuum science and technology. B, Nanotechnology & microelectronics, 36(6), . https://doi.org/10.1116/1.5043297

Chicago Style (17th ed.) Citation

Shah, Dhruv, Dhananjay I. Patel, Tuhin Roychowdhury, G. Bruce Rayner, Noel O’Toole, Donald R. Baer, and Matthew R. Linford. "Tutorial on Interpreting X-ray Photoelectron Spectroscopy Survey Spectra: Questions and Answers on Spectra from the Atomic Layer Deposition of Al2O3 on Silicon." Journal of Vacuum Science and Technology. B, Nanotechnology & Microelectronics 36, no. 6 (2018). https://doi.org/10.1116/1.5043297.

MLA (9th ed.) Citation

Shah, Dhruv, et al. "Tutorial on Interpreting X-ray Photoelectron Spectroscopy Survey Spectra: Questions and Answers on Spectra from the Atomic Layer Deposition of Al2O3 on Silicon." Journal of Vacuum Science and Technology. B, Nanotechnology & Microelectronics, vol. 36, no. 6, 2018, https://doi.org/10.1116/1.5043297.