Influence of master fabrication techniques on the characteristics of embossed microfluidic channels

• Published in: Lab on a chip Vol. 3; no. 2; p. 121
• Main Authors: Esch, Mandy B., Kapur, Sahil, Irizarry, Gizaida, Genova, Vincent
• Format: Journal Article
• Language: English
• Published: England 01.01.2003
• Subjects: Coated Materials, Biocompatible - chemistry; Hot Temperature; Materials Testing; Microfluidics - instrumentation; Microscopy, Atomic Force; Microscopy, Electron, Scanning; Pressure; Silicon Compounds - chemistry; Surface Properties; Temperature; Time Factors

We describe protocols for the fabrication of microfluidic devices in plastics using a number of different embossing masters. Masters were fabricated by deep reactive ion etching (DRIE) of silicon (100), wet etching of silicon (100) and (110), and SU-8 processing. Structures embossed into a cyclo-ole...