Ultra-Low Resonant Piezoelectric MEMS Energy Harvester With High Power Density

• Published in: Journal of microelectromechanical systems Vol. 26; no. 6; pp. 1226 - 1234
• Main Authors: Hyun-Cheol Song, Kumar, Prashant, Maurya, Deepam, Min-Gyu Kang, Reynolds, William T., Dae-Yong Jeong, Chong-Yun Kang, Priya, Shashank
• Format: Journal Article
• Language: English
• Published: United States IEEE 01.12.2017
• Subjects: Electrodes; Energy harvesting; Engineering; Instruments & Instrumentation; low resonance frequency; Micromechanical devices; Nanoscale devices; Physics; piezoelectric film; Piezoresistive devices; Resonant frequency; Science & Technology - Other Topics; spiral structure; Vibrations

We demonstrate a microscale vibration energy harvester exhibiting an ultra-low resonance frequency and high power density. A spiral shaped microelectromechanical system (MEMS) energy harvester was designed to harvest ambient vibrations at a low frequency (<;200 Hz) and acceleration (<;0.25 g)....