Ultra-Low Resonant Piezoelectric MEMS Energy Harvester With High Power Density - Hyun-Cheol Song; Kumar, Prashant; Maurya, Deepam; Min-Gyu Kang; Reynolds, William T.; Dae-Yong Jeong; Chong-Yun Kang; Priya, Shashank (Journal of microelectromechanical systems, 2017)
Keywords: Electrodes; Energy harvesting; Engineering; Instruments & Instrumentation; low resonance frequency; Micromechanical devices; Nanoscale devices; Physics; piezoelectric film; Piezoresistive devices; Resonant frequency; Science & Technology - Other Topics; spiral structure; Vibrations