Ultra-Low Resonant Piezoelectric MEMS Energy Harvester With High Power Density

We demonstrate a microscale vibration energy harvester exhibiting an ultra-low resonance frequency and high power density. A spiral shaped microelectromechanical system (MEMS) energy harvester was designed to harvest ambient vibrations at a low frequency (<;200 Hz) and acceleration (<;0.25 g)....

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Published inJournal of microelectromechanical systems Vol. 26; no. 6; pp. 1226 - 1234
Main Authors Hyun-Cheol Song, Kumar, Prashant, Maurya, Deepam, Min-Gyu Kang, Reynolds, William T., Dae-Yong Jeong, Chong-Yun Kang, Priya, Shashank
Format Journal Article
LanguageEnglish
Published United States IEEE 01.12.2017
Subjects
Electrodes
Energy harvesting
Engineering
Instruments & Instrumentation
low resonance frequency
Micromechanical devices
Nanoscale devices
Physics
piezoelectric film
Piezoresistive devices
Resonant frequency
Science & Technology - Other Topics
spiral structure
Vibrations
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Abstract We demonstrate a microscale vibration energy harvester exhibiting an ultra-low resonance frequency and high power density. A spiral shaped microelectromechanical system (MEMS) energy harvester was designed to harvest ambient vibrations at a low frequency (<;200 Hz) and acceleration (<;0.25 g). High quality Pb(Zr 0.48 Ti 0.52 )O 3 (PZT) film with 1.8 μm-thickness exhibiting remanent polarization of 36.2 μC/cm 2 and longitudinal piezoelectric constant of 155 pm/V was synthesized to achieve high efficiency mechanical to electrical conversion. The experimental results demonstrate an ultra-low natural frequency of 48 Hz for MEMS harvester. This is one of the lowest resonance frequency reported for the piezoelectric MEMS energy harvester. Further, the position of the natural frequency was controlled by modulating the number of spiral turns and weight of the proof mass. The vibration mode shape and stress distribution were validated through a finite element analysis. The maximum output power of 23.3 nW was obtained from the five turns spiral MEMS energy harvester excited at 0.25 g acceleration and 68Hz. The normalized area and the volumetric energy density were measured to be 5.04 × 10 -4 μW/mm 2 · g 2 · Hz and 4.92 × 10 -2 μW/mm 3 · g 2 · Hz, respectively.
AbstractList We demonstrate a microscale vibration energy harvester exhibiting an ultra-low resonance frequency and high power density. A spiral shaped microelectromechanical system (MEMS) energy harvester was designed to harvest ambient vibrations at a low frequency (<;200 Hz) and acceleration (<;0.25 g). High quality Pb(Zr 0.48 Ti 0.52 )O 3 (PZT) film with 1.8 μm-thickness exhibiting remanent polarization of 36.2 μC/cm 2 and longitudinal piezoelectric constant of 155 pm/V was synthesized to achieve high efficiency mechanical to electrical conversion. The experimental results demonstrate an ultra-low natural frequency of 48 Hz for MEMS harvester. This is one of the lowest resonance frequency reported for the piezoelectric MEMS energy harvester. Further, the position of the natural frequency was controlled by modulating the number of spiral turns and weight of the proof mass. The vibration mode shape and stress distribution were validated through a finite element analysis. The maximum output power of 23.3 nW was obtained from the five turns spiral MEMS energy harvester excited at 0.25 g acceleration and 68Hz. The normalized area and the volumetric energy density were measured to be 5.04 × 10 -4 μW/mm 2 · g 2 · Hz and 4.92 × 10 -2 μW/mm 3 · g 2 · Hz, respectively.
Not provided.
Author Hyun-Cheol Song
Min-Gyu Kang
Priya, Shashank
Chong-Yun Kang
Reynolds, William T.
Kumar, Prashant
Dae-Yong Jeong
Maurya, Deepam
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  surname: Kumar
  fullname: Kumar, Prashant
  organization: Center for Energy Harvesting Mater. & Syst., Virginia Tech, Blacksburg, VA, USA
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  surname: Maurya
  fullname: Maurya, Deepam
  organization: Center for Energy Harvesting Mater. & Syst., Virginia Tech, Blacksburg, VA, USA
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  surname: Min-Gyu Kang
  fullname: Min-Gyu Kang
  organization: Center for Energy Harvesting Mater. & Syst., Virginia Tech, Blacksburg, VA, USA
– sequence: 5
  givenname: William T.
  surname: Reynolds
  fullname: Reynolds, William T.
  organization: Dept. of Mater. Sci. & Eng., Virginia Tech, Blacksburg, VA, USA
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  surname: Dae-Yong Jeong
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  organization: Dept. of Mater. Sci. Eng., Inha Univ., Incheon, South Korea
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  surname: Chong-Yun Kang
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  email: cykang@kist.re.kr
  organization: Center for Electron. Mater., Korea Inst. of Sci. Technol., Seoul, South Korea
– sequence: 8
  givenname: Shashank
  surname: Priya
  fullname: Priya, Shashank
  email: spriya@vt.edu
  organization: Center for Energy Harvesting Mater. & Syst., Virginia Tech, Blacksburg, VA, USA
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Snippet We demonstrate a microscale vibration energy harvester exhibiting an ultra-low resonance frequency and high power density. A spiral shaped...
Not provided.
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ieee
SourceType Open Access Repository
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StartPage 1226
SubjectTerms Electrodes
Energy harvesting
Engineering
Instruments & Instrumentation
low resonance frequency
Micromechanical devices
Nanoscale devices
Physics
piezoelectric film
Piezoresistive devices
Resonant frequency
Science & Technology - Other Topics
spiral structure
Vibrations
Title Ultra-Low Resonant Piezoelectric MEMS Energy Harvester With High Power Density
URI https://ieeexplore.ieee.org/document/8006212
https://www.osti.gov/biblio/1541454
Volume 26
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