High-Tolerance Grating Couplers for Vertical Backside Coupling - Chen, Jui-Hung; Bouamra, Arthur D.; Wu, Chia-Ling; Fiore, Andrea; Tseng, Shuo-Yen (Applied sciences, 2024)
Keywords: Design; Geometry; grating coupler; Light; optical fiber sensors; Optimization; photonic integrated circuits; Photonics; Semiconductors; Sensors