MoS2 nanoworm thin films for NO2 gas sensing application

• Published in: Thin solid films Vol. 725; p. 138625
• Main Authors: Neetika, Kumar, Arvind, Chandra, Ramesh, Malik, V.K.
• Format: Journal Article
• Language: English
• Published: Elsevier B.V 01.05.2021
• Subjects: Gas sensor; Molybdenum disulfide; Nanoworm; Nitrogen dioxide; Sputtering; Gas sensor; Molybdenum disulfide; Nitrogen dioxide; Nanoworm; Sputtering

•MoS2 thin films of different thickness were grown on p-Si using DC sputtering.•Sputtered MoS2 films show the thickness dependent surface morphology.•NO2 gas sensing measurements have been performed for MoS2 nanoworm sensor.•MoS2 nanoworm sensor exhibits fast response and recovery for 100 ppm at 150...