Wafer Sojourn Time Fluctuation Analysis of Time-Constrained Dual-Arm Cluster Tools With Wafer Revisiting and Activity Time Variation

• Published in: IEEE transactions on systems, man, and cybernetics. Systems Vol. 48; no. 4; pp. 622 - 636
• Main Authors: Qiao, Yan, Wu, NaiQi, Yang, FaJun, Zhou, MengChu, Zhu, QingHua
• Format: Journal Article
• Language: English
• Published: New York IEEE 01.04.2018; The Institute of Electrical and Electronics Engineers, Inc. (IEEE)
• Subjects: Cluster tools; Clusters; Delay effects; discrete event systems; Markov analysis; Optimal scheduling; Petri net (PN); robotic systems; Robots; Schedules; scheduling and control; Semiconductor device modeling; semiconductor manufacturing; Simulation; Time factors; Time lag; Upper bounds; Variation

A robotic cluster tool involves many activities whose time is subject to some disturbance, thus leading to the activity time variation. It results in wafer sojourn time fluctuation in a process module, which may in turn violate wafer residency time constraints. Some wafer fabrication requires a revi...