APA (7th ed.) Citation

Qiao, Y., Wu, N., Yang, F., Zhou, M., & Zhu, Q. (2018). Wafer Sojourn Time Fluctuation Analysis of Time-Constrained Dual-Arm Cluster Tools With Wafer Revisiting and Activity Time Variation. IEEE transactions on systems, man, and cybernetics. Systems, 48(4), 622-636. https://doi.org/10.1109/TSMC.2016.2600583

Chicago Style (17th ed.) Citation

Qiao, Yan, NaiQi Wu, FaJun Yang, MengChu Zhou, and QingHua Zhu. "Wafer Sojourn Time Fluctuation Analysis of Time-Constrained Dual-Arm Cluster Tools With Wafer Revisiting and Activity Time Variation." IEEE Transactions on Systems, Man, and Cybernetics. Systems 48, no. 4 (2018): 622-636. https://doi.org/10.1109/TSMC.2016.2600583.

MLA (9th ed.) Citation

Qiao, Yan, et al. "Wafer Sojourn Time Fluctuation Analysis of Time-Constrained Dual-Arm Cluster Tools With Wafer Revisiting and Activity Time Variation." IEEE Transactions on Systems, Man, and Cybernetics. Systems, vol. 48, no. 4, 2018, pp. 622-636, https://doi.org/10.1109/TSMC.2016.2600583.