Numerical investigation into nonlinear dynamic behavior of electrically-actuated clamped–clamped micro-beam with squeeze-film damping effect
A numerical investigation is performed into the nonlinear dynamic behavior of a clamped–clamped micro-beam actuated by a combined DC/AC voltage and subject to a squeeze-film damping effect. An analytical model based on a nonlinear deflection equation and a linearized Reynolds equation is proposed to...
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| Published in | Applied mathematical modelling Vol. 38; no. 13; pp. 3269 - 3280 |
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| Main Authors | , |
| Format | Journal Article |
| Language | English |
| Published |
Elsevier Inc
01.07.2014
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| Subjects | |
| Online Access | Get full text |
| ISSN | 0307-904X |
| DOI | 10.1016/j.apm.2013.11.048 |
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| Abstract | A numerical investigation is performed into the nonlinear dynamic behavior of a clamped–clamped micro-beam actuated by a combined DC/AC voltage and subject to a squeeze-film damping effect. An analytical model based on a nonlinear deflection equation and a linearized Reynolds equation is proposed to describe the deflection of the micro-beam under the effects of the electrostatic actuating force. The deflection of the micro-beam is investigated under various actuating conditions by solving the analytical model using a hybrid numerical scheme comprising the differential transformation method and the finite difference approximation method. It is shown that the numerical results for the dynamic pull-in voltage of the clamped–clamped micro-beam deviate by no more than 2.04% from those presented in the literature based on the conventional finite difference scheme. The effects of the AC voltage amplitude, excitation frequency, residual stress, and ambient pressure on the center-point displacement of the micro-beam are systematically explored. Moreover, the actuation conditions which ensure the stability of the micro-beam are identified by means of phase portraits. Overall, the results presented in this study confirm that the hybrid numerical method provides an accurate means of analyzing the complex nonlinear behavior of common electrostatically-actuated microstructures. |
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| AbstractList | A numerical investigation is performed into the nonlinear dynamic behavior of a clamped-clamped micro-beam actuated by a combined DC/AC voltage and subject to a squeeze-film damping effect. An analytical model based on a nonlinear deflection equation and a linearized Reynolds equation is proposed to describe the deflection of the micro-beam under the effects of the electrostatic actuating force. The deflection of the micro-beam is investigated under various actuating conditions by solving the analytical model using a hybrid numerical scheme comprising the differential transformation method and the finite difference approximation method. It is shown that the numerical results for the dynamic pull-in voltage of the clamped-clamped micro-beam deviate by no more than 2.04% from those presented in the literature based on the conventional finite difference scheme. The effects of the AC voltage amplitude, excitation frequency, residual stress, and ambient pressure on the center-point displacement of the micro-beam are systematically explored. Moreover, the actuation conditions which ensure the stability of the micro-beam are identified by means of phase portraits. Overall, the results presented in this study confirm that the hybrid numerical method provides an accurate means of analyzing the complex nonlinear behavior of common electrostatically-actuated microstructures. |
| Author | Wang, Cheng-Chi Liu, Chin-Chia |
| Author_xml | – sequence: 1 givenname: Chin-Chia surname: Liu fullname: Liu, Chin-Chia email: ccliu@cc.ncue.edu.tw organization: Department of Industrial Education and Technology, National Changhua University of Education, Bao-Shan Campus, Number 2, Shi-Da Road, Changhua 500, Taiwan, ROC – sequence: 2 givenname: Cheng-Chi surname: Wang fullname: Wang, Cheng-Chi organization: Ph.D. Program, Graduate Institute of Precision Manufacturing, National Chin-Yi University of Technology, Taichung County 411, Taiwan, ROC |
| BookMark | eNqFkb1uFDEUhV0EiSTwAHQuaWa4Hs_YM6JCEX9SBA1IdJbHc5145bEX27toU_EENLwhT4I3m4oiVL5XOt-R7zkX5CzEgIS8YNAyYOLVptXbte2A8ZaxFvrxjJwDB9lM0H97Si5y3gDAULdz8uvTbsXkjPbUhT3m4m50cTHUrURajb0LqBNdDkGvztAZb_XexUSjpejRlHvWHxptyk4XXKjxet3i8ufn74eJVi7FZka90h-u3NL8fYd4h411fqVL1bhwQ9Ha6vaMPLHaZ3z-8F6Sr-_efrn60Fx_fv_x6s11Y7jgpeFslFM3T5xLre0Mg2X1PtGzYRZmmcQyWq6lBTGbzozQwSRHLqYO-xHnsev5JXl58t2mWH-Ti1pdNui9Dhh3WTEh5dSDHIf_SwcBDDoGR1d5ktZ7c05olXHlPs6StPOKgToWpDaqFqSOBSnGVC2okuwfcpvcqtPhUeb1icEa1N5hUtk4DAYXl2qUaonuEfovbcCwkw |
| CitedBy_id | crossref_primary_10_1007_s40819_017_0417_2 crossref_primary_10_21595_jve_2016_18050 crossref_primary_10_1007_s11831_021_09618_2 crossref_primary_10_1016_j_apm_2016_11_025 crossref_primary_10_1007_s00542_015_2587_3 crossref_primary_10_1016_j_sna_2016_07_017 crossref_primary_10_1080_00207160_2020_1711887 crossref_primary_10_1007_s11071_019_04928_4 crossref_primary_10_1016_j_apm_2022_02_016 crossref_primary_10_1016_j_ijnonlinmec_2016_03_007 crossref_primary_10_1007_s11071_021_07025_7 crossref_primary_10_1080_23080477_2017_1339251 crossref_primary_10_1108_EC_04_2017_0150 crossref_primary_10_1016_j_apm_2018_06_004 crossref_primary_10_1016_j_ymssp_2025_112574 |
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| ContentType | Journal Article |
| Copyright | 2013 Elsevier Inc. |
| Copyright_xml | – notice: 2013 Elsevier Inc. |
| DBID | 6I. AAFTH AAYXX CITATION 7SC 8FD JQ2 L7M L~C L~D |
| DOI | 10.1016/j.apm.2013.11.048 |
| DatabaseName | ScienceDirect Open Access Titles Elsevier:ScienceDirect:Open Access CrossRef Computer and Information Systems Abstracts Technology Research Database ProQuest Computer Science Collection Advanced Technologies Database with Aerospace Computer and Information Systems Abstracts Academic Computer and Information Systems Abstracts Professional |
| DatabaseTitle | CrossRef Computer and Information Systems Abstracts Technology Research Database Computer and Information Systems Abstracts – Academic Advanced Technologies Database with Aerospace ProQuest Computer Science Collection Computer and Information Systems Abstracts Professional |
| DatabaseTitleList | Computer and Information Systems Abstracts Computer and Information Systems Abstracts |
| DeliveryMethod | fulltext_linktorsrc |
| Discipline | Mathematics |
| EndPage | 3280 |
| ExternalDocumentID | 10_1016_j_apm_2013_11_048 S0307904X13007841 |
| GroupedDBID | --K --M -~X .DC .~1 0R~ 1B1 1RT 1~. 1~5 23M 4.4 457 4G. 5GY 5VS 6I. 7-5 71M 8P~ 9JN AACTN AAEDT AAEDW AAFTH AAIAV AAIKJ AAKOC AAOAW AAQFI AAXUO ABAOU ABMAC ABVKL ABXDB ABYKQ ACAZW ACDAQ ACGFS ACRLP ADBBV ADEZE ADTZH AEBSH AECPX AEKER AENEX AEXQZ AFKWA AFTJW AGUBO AGYEJ AHHHB AHJVU AIEXJ AIGVJ AIKHN AITUG AJBFU AJOXV ALMA_UNASSIGNED_HOLDINGS AMFUW AMRAJ ARUGR AXJTR BJAXD BKOJK BLXMC CS3 EBS EFJIC EFLBG EJD EO8 EO9 EP2 EP3 F5P FDB FIRID FNPLU FYGXN G-Q GBLVA IHE IXB J1W JJJVA KOM LG9 LY7 M26 M41 MHUIS MO0 N9A NCXOZ O-L O9- OAUVE OK1 OZT P-8 P-9 P2P PC. Q38 RIG ROL RPZ SDF SDG SES SPC SPCBC SST SSW SSZ T5K TN5 WH7 ZMT ~02 ~G- AALRI AAQXK AATTM AAXKI AAYWO AAYXX ABEFU ABFNM ABJNI ABWVN ACNNM ACRPL ACVFH ADCNI ADMUD ADNMO ADVLN AEIPS AEUPX AFFNX AFJKZ AFPUW AFXIZ AGCQF AGHFR AGQPQ AGRNS AIGII AIIUN AKBMS AKRWK AKYEP ANKPU APXCP ASPBG AVWKF AZFZN BNPGV CITATION FGOYB G-2 HZ~ MVM R2- SEW SSH WUQ XJT XPP 7SC 8FD EFKBS JQ2 L7M L~C L~D |
| ID | FETCH-LOGICAL-c363t-318792b9337aafb05f13076415b6cd96d8f3a7f06bc2c80209783692e48eb8243 |
| IEDL.DBID | AIKHN |
| ISSN | 0307-904X |
| IngestDate | Thu Sep 04 16:36:18 EDT 2025 Fri Sep 05 14:22:36 EDT 2025 Tue Jul 01 02:00:48 EDT 2025 Thu Apr 24 23:10:29 EDT 2025 Fri Feb 23 02:30:52 EST 2024 |
| IsDoiOpenAccess | true |
| IsOpenAccess | true |
| IsPeerReviewed | true |
| IsScholarly | true |
| Issue | 13 |
| Keywords | MEMS Pull-in voltage Differential transformation Squeeze film damping effect Reynolds equation Finite difference method |
| Language | English |
| License | http://www.elsevier.com/open-access/userlicense/1.0 |
| LinkModel | DirectLink |
| MergedId | FETCHMERGED-LOGICAL-c363t-318792b9337aafb05f13076415b6cd96d8f3a7f06bc2c80209783692e48eb8243 |
| Notes | ObjectType-Article-2 SourceType-Scholarly Journals-1 ObjectType-Feature-1 content type line 23 ObjectType-Article-1 ObjectType-Feature-2 |
| OpenAccessLink | https://www.sciencedirect.com/science/article/pii/S0307904X13007841 |
| PQID | 1560102104 |
| PQPubID | 23500 |
| PageCount | 12 |
| ParticipantIDs | proquest_miscellaneous_1677940785 proquest_miscellaneous_1560102104 crossref_citationtrail_10_1016_j_apm_2013_11_048 crossref_primary_10_1016_j_apm_2013_11_048 elsevier_sciencedirect_doi_10_1016_j_apm_2013_11_048 |
| ProviderPackageCode | CITATION AAYXX |
| PublicationCentury | 2000 |
| PublicationDate | 2014-07-01 2014-07-00 20140701 |
| PublicationDateYYYYMMDD | 2014-07-01 |
| PublicationDate_xml | – month: 07 year: 2014 text: 2014-07-01 day: 01 |
| PublicationDecade | 2010 |
| PublicationTitle | Applied mathematical modelling |
| PublicationYear | 2014 |
| Publisher | Elsevier Inc |
| Publisher_xml | – name: Elsevier Inc |
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| SSID | ssj0005904 |
| Score | 2.1531022 |
| Snippet | A numerical investigation is performed into the nonlinear dynamic behavior of a clamped–clamped micro-beam actuated by a combined DC/AC voltage and subject to... A numerical investigation is performed into the nonlinear dynamic behavior of a clamped-clamped micro-beam actuated by a combined DC/AC voltage and subject to... |
| SourceID | proquest crossref elsevier |
| SourceType | Aggregation Database Enrichment Source Index Database Publisher |
| StartPage | 3269 |
| SubjectTerms | Clamps Deflection Differential transformation Electric potential Finite difference method Mathematical analysis Mathematical models MEMS Nonlinear dynamics Nonlinearity Pull-in voltage Reynolds equation Squeeze film damping effect Voltage |
| Title | Numerical investigation into nonlinear dynamic behavior of electrically-actuated clamped–clamped micro-beam with squeeze-film damping effect |
| URI | https://dx.doi.org/10.1016/j.apm.2013.11.048 https://www.proquest.com/docview/1560102104 https://www.proquest.com/docview/1677940785 |
| Volume | 38 |
| hasFullText | 1 |
| inHoldings | 1 |
| isFullTextHit | |
| isPrint | |
| link | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwnV3NbtQwEB612wscKtqCaIHKSJwqpZvEjhMfS9VqC-peoNLeLP9FWrR_6u4e2kPFE3DhDXkSZuKkFQjtgVsceZTEM57xZL6ZAfhgTCls7sgtsSERQRaJMbVK8tw6ZaogrGkAskM5uBGfRsVoC867XBiCVba6P-r0Rlu3d_rtavYX43H_C4mnSsWIAjIUPduGnZwrWfRg5-zq82D4hPRQqejqIRJBF9xsYF5mQfnoGT-lWp7UBejf5ukvRd1Yn8sXsNseG9lZfLM92AqzfXh-_VhzdXkAP4brGH2ZsPFT8Yz5DEerOZvFkhjmlvnYg551CfpsXrPYDIdoJ3eJoZwSPIgyh9KyCP7X95_tFZsSfC-xwUwZ_cBlS_KD70NSjydT5nEOGkIWISIv4eby4uv5IGm7LSSOS76iNOpS5VZxXiK3bFrUuLClRANvpfNK-qrmpqxTaV3uKjxlNgkgKg-iCrbKBX8FPfyW8BqY58p73H2-dkZIWRpRVL6oZRZCZgrvDyHtFlm7thQ5dcSY6A5z9k0jXzTxBV0UjXw5hJNHkkWsw7Fpsug4p_8QJo12YhPZ-47LGjcZRU7MLMzXS501fit6x2LDHFmibkNJLI7-7_Fv4BmORMQCv4Xe6nYd3uGJZ2WPYfv0ITtu5RpHV6OPvwHuHwWD |
| linkProvider | Elsevier |
| linkToHtml | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwnV25TsQwELU4CqBAnOLGSFRIYbOJ48QlINBybQNI21m-Ii3aS-xuARVfQMMf8iXMxAkIhLagy2EriWc8R2bmDSGHSqVMRwbdEu0C5ngSKJWLIIq0ESpzTKsiQbbJGw_sqpW0pshZVQuDaZWl7PcyvZDW5ZVauZq1Qbtdu0P2FCFrYUAGo2fTZBasAY4A-pet0-88DxGyCg0Rh1ehzSLJSw2wGr0eHyOSJ_YA-ls5_RLThe65WCKLpdFIT_x7LZMp11shC7dfiKvDVfLWHPvYS4e2v6Ez-j04G_VpzwNiqCdqfQd6WpXn035OfSscnNt5DhRWlIAZSg3wysDZj9f38oh2MXkv0E51Kf6-pUP0gl9ckLc7XWphDKhB6hNE1sjDxfn9WSMoey0EJubxCIuoUxFpEccp0EqHSQ7LmnJQ75obK7jN8lileci1iUwGNmZR_iEixzKns4jF62QGvsVtEGpjYS3sPZsbxThPFUsym-S87lxdJdZukrBaZGlKIHLsh9GRVcbZowS6SKQLOCgS6LJJjr6mDDwKx6TBrKKc_MFKErTEpGkHFZUlbDGMm6ie64-Hsl54reAbswljeAqSDfgw2frf4_fJXOP-9kbeXDavt8k83GE-K3iHzIyexm4XbJ-R3it4-xMg6gVX |
| openUrl | ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&rft.genre=article&rft.atitle=Numerical+investigation+into+nonlinear+dynamic+behavior+of+electrically-actuated+clamped%E2%80%93clamped+micro-beam+with+squeeze-film+damping+effect&rft.jtitle=Applied+mathematical+modelling&rft.au=Liu%2C+Chin-Chia&rft.au=Wang%2C+Cheng-Chi&rft.date=2014-07-01&rft.issn=0307-904X&rft.volume=38&rft.issue=13&rft.spage=3269&rft.epage=3280&rft_id=info:doi/10.1016%2Fj.apm.2013.11.048&rft.externalDBID=n%2Fa&rft.externalDocID=10_1016_j_apm_2013_11_048 |
| thumbnail_l | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/lc.gif&issn=0307-904X&client=summon |
| thumbnail_m | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/mc.gif&issn=0307-904X&client=summon |
| thumbnail_s | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/sc.gif&issn=0307-904X&client=summon |