The electrical, optical properties of AlSb polycrystalline thin films deposited by magnetron co-sputtering without annealing

• Published in: Chinese physics B Vol. 19; no. 12; pp. 456 - 459
• Main Author: 黄征 武莉莉 黎兵 郝霞 贺剑雄 冯良桓 李卫 张静全 蔡亚平
• Format: Journal Article
• Language: English
• Published: IOP Publishing 01.12.2010
• Subjects: AlSb; 光学特性; 基板温度; 多晶薄膜; 平均晶粒尺寸; 磁控共溅射

In order to fabricate A1Sb polycrystalline thin films without post annealing, this paper studies a technology of magnetron co-sputtering onto intentionally heated substrate. It compares the structural characteristics and electrical properties of A1Sb films which are deposited at different substrate...