Doping of ultra-thin Si films: Combined first-principles calculations and experimental study - Gity, Farzan; Meaney, Fintan; Curran, Anya; Hurley, Paul K.; Fahy, Stephen; Duffy, Ray; Ansari, Lida (Journal of applied physics, 2021)
Keywords: Applied physics; Conduction bands; Density functional theory; Dopants; Doping; Electrical properties; Electronic devices; Film thickness; First principles; Free energy; Heat of formation; High resolution electron microscopy; Ion implantation; Phosphorus; Quantum confinement; Silicon films; Temperature dependence; Thin films