GaAs-based multiple-quantum-well spatial light modulators fabricated by a wafer-scale process

The design, fabrication, and characterization of large, two-dimensional multiple-quantum-well modulator arrays are presented. Such arrays present a speed advantage compared with competing technologies such as liquid crystals and micromirrors, which are intrinsically limited to the kilohertz range. W...

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Bibliographic Details
Published inApplied optics (2004) Vol. 44; no. 9; p. 1635
Main Authors Junique, Stéphane, Wang, Qin, Almqvist, Susanne, Guo, Jianhua, Martijn, Henk, Noharet, Bertrand, Andersson, Jan Y
Format Journal Article
LanguageEnglish
Published United States 20.03.2005
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Summary:The design, fabrication, and characterization of large, two-dimensional multiple-quantum-well modulator arrays are presented. Such arrays present a speed advantage compared with competing technologies such as liquid crystals and micromirrors, which are intrinsically limited to the kilohertz range. We discuss the design compromises to reach high-contrast, low-voltage swing optical structures compatible with complementary metal-oxide semiconductor-based integrated circuits and present experimental results. Contrast ratio of 5:1 (limited by the fill factor), variations in uniformity below 1nm, and frame rates in excess of 10kHz are demonstrated. Technology maturity for volume production is also discussed.
ISSN:1559-128X
2155-3165
DOI:10.1364/AO.44.001635