Accurate Extraction of Large Electromechanical Coupling in Piezoelectric MEMS Resonators

• Published in: Journal of microelectromechanical systems Vol. 28; no. 2; pp. 209 - 218
• Main Authors: Lu, Ruochen, Li, Ming-Huang, Yang, Yansong, Manzaneque, Tomas, Gong, Songbin
• Format: Journal Article
• Language: English
• Published: New York IEEE 01.04.2019; The Institute of Electrical and Electronics Engineers, Inc. (IEEE)
• Subjects: Admittance; Admittance measurement; Coupling; Couplings; electromechanical coupling; equivalent circuit model; Figure of merit; Integrated circuit modeling; lithium niobate; Lithium niobates; MBVD model; MEMS resonator; Microelectromechanical systems; Micromechanical devices; Piezoelectricity; Resonant frequency; Resonators

Recent advancements in the field of piezoelectric micro-resonators have produced devices, such as lithium niobate laterally vibrating resonators, with very high electromechanical coupling factors (k t 2 ) and respectable quality factors (Q). As a result, the records of the figure of merit (FoM) for...