Accurate Extraction of Large Electromechanical Coupling in Piezoelectric MEMS Resonators - Lu, Ruochen; Li, Ming-Huang; Yang, Yansong; Manzaneque, Tomas; Gong, Songbin (Journal of microelectromechanical systems, 2019)
Keywords: Admittance; Admittance measurement; Coupling; Couplings; electromechanical coupling; equivalent circuit model; Figure of merit; Integrated circuit modeling; lithium niobate; Lithium niobates; MBVD model; MEMS resonator; Microelectromechanical systems; Micromechanical devices; Piezoelectricity; Resonant frequency; Resonators