A generalized CMOS-MEMS platform for micromechanical resonators monolithically integrated with circuits

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Published inJournal of micromechanics and microengineering Vol. 21; no. 6; p. 065012
Main Authors Chen, Wen-Chien, Fang, Weileun, Li, Sheng-Shian
Format Journal Article
LanguageEnglish
Published Bristol IOP Publishing 01.06.2011
Institute of Physics
Subjects
Applied sciences
Electronics
Exact sciences and technology
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Mechanical instruments, equipment and techniques
Microelectronic fabrication (materials and surfaces technology)
Micromechanical devices and systems
Physics
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Metal oxides
Composite materials
Micromechanical resonators
Quality factor
Complementary MOS technology
Monolithic integrated circuits
Measurement sensor
Boundary conditions
Foundries
Radiofrequency
Microelectromechanical device
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Author Li, Sheng-Shian
Chen, Wen-Chien
Fang, Weileun
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Cites_doi 10.1109/84.870061
10.1016/S0924-4247(97)80100-8
10.1049/el:20053473
10.1109/4.839911
10.1109/JMEMS.2004.838383
10.1109/JMEMS.2009.2030074
10.1016/j.mee.2006.06.006
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Issue 6
Keywords Metal oxides
Composite materials
Micromechanical resonators
Quality factor
Complementary MOS technology
Monolithic integrated circuits
Measurement sensor
Boundary conditions
Foundries
Radiofrequency
Microelectromechanical device
Language English
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Institute of Physics
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SubjectTerms Applied sciences
Electronics
Exact sciences and technology
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Mechanical instruments, equipment and techniques
Microelectronic fabrication (materials and surfaces technology)
Micromechanical devices and systems
Physics
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Title A generalized CMOS-MEMS platform for micromechanical resonators monolithically integrated with circuits
URI http://iopscience.iop.org/0960-1317/21/6/065012
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