Combining Measurement and Control Functions in the Structure of a Multilayer Piezoelectric Actuator of Nano- and Micro-Motions

The principles of creating precision positioning devices based on the piezoelectric effect were studied. A promising scientific direction in the development of piezo actuators is distinguished – the creation of self-sensing devices simultaneously performing functions of an actuating mechanism (actua...

Full description

Saved in:
Bibliographic Details
Published inMeasurement techniques Vol. 60; no. 7; pp. 711 - 716
Main Authors Bardin, V. A., Vasil’ev, V. A.
Format Journal Article
LanguageEnglish
Published New York Springer US 01.10.2017
Springer
Subjects
Actuators
Analytical Chemistry
Characterization and Evaluation of Materials
Measurement
Measurement Science and Instrumentation
Measuring instruments
Physical Chemistry
Physics
Physics and Astronomy
Sensors
self-sensing actuator
control
nano- and micro-motion
multilayer structure
precision positioning
piezoelectric actuator
Online AccessGet full text

Cover

More Information
Summary:The principles of creating precision positioning devices based on the piezoelectric effect were studied. A promising scientific direction in the development of piezo actuators is distinguished – the creation of self-sensing devices simultaneously performing functions of an actuating mechanism (actuator) and primary measuring transducer (feedback sensor). An original structure of an adaptive multilayer piezoelectric actuator of nano- and micro-motions was developed. Its structural scheme is given and its advantages are shown.
ISSN:0543-1972
1573-8906
DOI:10.1007/s11018-017-1259-3