Analysis of the Shape of Cross Sections Developed under Shave-off Condition Sputtering

Shave-off method has been proven its efficacy for highly precise depth profiling in secondary ion mass spectrometry (SIMS) analysis. The unique technique, shave-off method has distinctive cross-sectional shape after scanning compared with raster scan method. We investigated the cross sectional shape...

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Bibliographic Details
Published inJournal of Surface Analysis Vol. 24; no. 2; pp. 164 - 166
Main Authors Kang, So-Hee, Fukushima, Miku, Asakura, Hiroyuki, Habib, Ahsan, Kim, Yun, Tomiyasu, Bunbunoshin, Owari, Masanori
Format Journal Article
LanguageEnglish
Japanese
Published Tokyo The Surface Analysis Society of Japan 2017
Surface Analysis Society of Japan
Subjects
Cross-sections
Depth profiling
Electron microscopes
Ion beams
Microscopes
Raster scanning
Scanning electron microscopy
Secondary ion mass spectrometry
Sputtering
Tungsten
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Summary:Shave-off method has been proven its efficacy for highly precise depth profiling in secondary ion mass spectrometry (SIMS) analysis. The unique technique, shave-off method has distinctive cross-sectional shape after scanning compared with raster scan method. We investigated the cross sectional shape of three different height tungsten samples using focused ion beam scanning electron microscopes (FIB-SEM) and transmission electron microscope (TEM). Though it is a simple cross-sectional shape, the analysis results enable the investigation of an angle between primary ion beam and sample surface, and sputtering yield.
ISSN:1341-1756
1347-8400
DOI:10.1384/jsa.24.164