Control of sonoluminescence signal in deionized water using carbon dioxide

• Published in: Microelectronic engineering Vol. 88; no. 12; pp. 3437 - 3441
• Main Authors: Kumari, S., Keswani, M., Singh, S., Beck, M., Liebscher, E., Deymier, P., Raghavan, S.
• Format: Journal Article Conference Proceeding
• Language: English
• Published: Amsterdam Elsevier B.V 01.12.2011; Elsevier
• Subjects: Acoustic cavitation; Applied sciences; Carbon dioxide; Cavitation threshold; Cleaning; Damage; Deionization; Electronics; Exact sciences and technology; Fractures; General (including economical and industrial fields); Inhibitors; Mechanical properties and methods of testing. Rheology. Fracture mechanics. Tribology; Megasonic cleaning; Metals. Metallurgy; Semiconductors; Sonoluminescence; Wafer damage; Wafers; Wafer damage; Sonoluminescence; Acoustic cavitation; Megasonic cleaning; Cavitation threshold; Carbon dioxide; Water; Material processing; In situ; Transients; Cavity; Electronics industry; Acoustic cleaning; Wafer; Damaging
• ISSN: 0167-9317; 1873-5568
• DOI: 10.1016/j.mee.2010.10.036

Megasonic cleaning is routinely employed in semiconductor industry for cleaning of wafers. However, the method also results in damage to wafer features and such damage has been proposed to arise from transient, imploding cavities formed during megasonic processing. Transient cavitation is associated with the release of light, a phenomenon called sonoluminescence (SL) and the extent of damage has been shown to correlate with the intensity of SL. Control of sonoluminescence may therefore allow control of damage during megasonic processing of wafers. In this study, the ability of carbon dioxide to quench sonoluminescence generation in deionized water exposed to megasonic field of varying power density and duty cycle has been systematically investigated. It has been found that CO 2 is not only incapable but also a potent inhibitor of sonoluminescence, providing a potential means for selective alleviation of the violent effects of transient cavitation in process fluids. A novel chemical method has been established for in situ release of CO 2 from NH 4HCO 3 through a pH induced shift in the carbonic acid equilibria in deionized water. Using this method, a precisely controlled, progressive decrease in SL of air saturated deionized water through addition of NH 4HCO 3 has been demonstrated. It has been determined that 130 ppm of released CO 2 is sufficient for complete inhibition of sonoluminescence generated in air saturated deionized water.