Key Feature Identification for Monitoring Wafer-to-Wafer Variation in Semiconductor Manufacturing - Fan, Shu-Kai S.; Hsu, Chia-Yu; Tsai, Du-Ming; Chou, Mabel C.; Jen, Chih-Hung; Tsou, Jen-Hsuan (IEEE transactions on automation science and engineering, 2022)
Keywords: AdaBoost; Alarms; Clustering algorithms; Empirical analysis; False alarms; Fault detection; Fault diagnosis; Feature extraction; feature selection; Machine learning; Manufacturing; Metrology; Monitoring; Performance prediction; Process monitoring; Self organizing maps; Self-organizing feature maps; self-organizing map; Semiconductor device modeling; wafer-to-wafer variation