Capacitance spectroscopy of structures with Si nanoparticles deposited onto crystalline silicon p-Si

• Published in: Semiconductor science and technology Vol. 34; no. 8; pp. 85003 - 85013
• Main Authors: Sobolev, M M, Ken, O S, Sreseli, O M, Yavsin, D A, Gurevich, S A
• Format: Journal Article
• Language: English
• Published: IOP Publishing 01.08.2019
• Subjects: amorphous silicon nanoparticle; capacitance spectroscopy; close-packed; quantum-dots; spatially localized carriers

Capacitance spectroscopy has been used to study close-packed amorphous silicon nanoparticle layers (100 nm) deposited on p-type crystalline silicon by the laser electrodispersion method. It was found that this structure is an Au-nano-Si-p-Si p-n heterojunction that exhibit rectifying properties. In...